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A total four group of samples were open to it investigation because the, regular test (as opposed to backgrinding), Back grinded examples of five additional thicknesses (BG-500, three hundred, 150 & 75um). Not too long ago, of a lot lower-k information have been designed, and they is going to be generally categorized for the Lorsque-dependent and you can non-Lorsque founded. Si-dependent product will be after that classified to your Quand-dependent and you can silsesquioxane (SSQ) based, including hydrogen-SSQ (HSSQ) and you will methyl-SSQ (MSSQ). Non-Quand dependent lower-k information is going to be next split into two teams, polymer founded and amorphous carbon. Various kinds lowest-k information that have ranged lowest-k values as well as other deposition procedures are increasingly being utilized in the newest IC fabrication technology. Get in on the VIP Bar at the Black colored Diamond online casino and you may gamble between the elite with your specialist VIP advantages to the VIP dining tables.
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Radial breaks in the video clips noticed for everybody thicknesses because the revealed from the arrows. Load-displacement contours to possess Black colored Diamond TM (BD) video clips from half dozen various other thicknesses less than nanoindentation, (a) a hundred, (b) three hundred, (c) five-hundred, (d) 700, (e) 1000 and you may (f) 1200 nm. BEOL multilevel interconnect formations were varieties of information, including Cu, low-k product, oxides and you will nitrides. Copper interconnects inside the BEOL technology involve some pressures for example, terrible adhesion to dielectric product and you can diffusion of copper for the silicone polymer substrates. Copper easily responds with silicone polymer and you will models copper silicide during the reduced temperature 22-23. Contours away from copper within the silicone polymer substrate may cause bad influence on device process.
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